Description
Introduction
The SEM5000 is a high-resolution, feature-rich field emission scanning electron microscope. Advanced lens barrel design, high-voltage tunnel technology (SuperTunnel), low aberration and no magnetic leakage objective lens design, realize low-voltage highresolution imaging, and magnetic samples are applicable. Optical navigation, complete automatic functions, welldesigned human-computer interaction, optimized operation and use process, no matter how experienced you are, you can get started quickly and complete high-resolution shooting tasks.
Product Features
1. High resolution, high resolution imaging at low accelerating voltage
2. High-voltage tunnel technology (SuperTunnel), the electrons in the tunnel can maintain high energy, reduce the space charge effect, and ensure low voltage resolution
3. Electromagnetic compound objective lens, reduces aberration, significantly improves resolution at low voltage, and can observe magnetic samples
4. There is no crossover in the electronic optical path, effectively reducing system aberration and improving resolution.
5. Water-cooled constant temperature objective lens to ensure the stability, reliability and repeatability of the objective lens work
6. Magnetic deflection six-aperture adjustable aperture, automatic switching aperture aperture, no need for mechanical adjustment, to achieve high-resolution observation or fast switching of large beam current analysis modes
Application Field
Applications Cases
Specifications
| Models | SEM5000 | |
| Key Paramater | Resolution | 1.0 nm @ 15 kV, SE |
| 1.5 nm @ 1.0 kV, SE | ||
| 0.8 nm @ 30 kV, SE | ||
| Accelerating voltage | 20 V ~ 30 KV | |
| Magnificaton | 1-1000,000x (Screen Magnification) | |
| Electron gun type | Schottky Field Emission Electron Gun | |
| Sample Chamber | Vacuum System | Fully automatic control, oil-free vacuum system |
| Camera | Dual cameras (optional navigation + in-sample monitoring) | |
| Sample stage travel | X: 120mm | |
| Y: 115mm | ||
| Z: 50mm | ||
| T: -10°~ +90° | ||
| R: 360° | ||
| (* Oversized bin version is optional) | ||
| Vacuum System | Vacuum Model | Better than 5×10-4 Pa |
| 5 ~ 1000 Pa | ||
| Control Mode | Automatic Valve | |
| Turbomolecular Pump | ≥ 240 L/S | |
| Mechanical Pump | 200 L/min (50 Hz) | |
| Detectors & Extensions | Standard Configuration | High-angle electronic detector in the lens barrel |
| Lateral Low Angle Electron Detector | ||
| Optional Accessories | Plug-in Backscattered Electron Detector | |
| STEM Automatic Insertion Scanning Transmission Detector | ||
| Sample Exchange Chamber | ||
| High Speed Beam Gate and Electron Beam Exposure | ||
| EDS energy spectrometer | ||
| EBSD Backscatter Diffraction | ||
| EBIC electron beam induced current | ||
| CL cathode fluorescence | ||
| High and low temperature in-situ stretching table | ||
| Nano manipulator | ||
| Large picture stitching | ||
| Software | Language | English/Chineses |
| Operating System | Windows | |
| Navigations | Optical Navigation, Gesture Quick Navigation | |
| Automatic Functions | Auto Brightness Contrast, Auto Focus, Automatic Dissipation | |
| Installation Requirements | Space | L≥ 3000 mm, W ≥ 4000 mm, H ≥ 2300 mm |
| Temperature | 20°C (68°F) ~ 25°C (77°F) | |
| Humidity | ≤ 50 % | |
| Power Supply | AC 220 V(±10 %), 50 Hz, 2 kVA | |
